In the manufacturing of semiconductors, for which the control of precise temperature is extremely important, the chillers that have been employed traditionally use f-gas refrigerants.
In the year 2015, however, the ATS Japan which is a division of the U.S.-based chiller manufacturer ATS, planned to start moving towards the usage of carbon dioxide refrigerant for their semiconductor chillers.
ATS Japan currently has a chiller of the Model GX-20, that uses carbon dioxide, and it is also the first chiller in the industry of semiconductors to make use of this refrigerant.
The unit has already been attracting attention as a chiller of the next- generation in Europe, and the company has begun a field trial of their system in the month of June 2019 at a German manufacturing company of semiconductor.
ATS Japan was founded in the year 2001 manufactures chillers for the solar cell, semiconductor, food, as well as the industries of medical devices among many others. Their decision in the year 2015 for developing a chiller of carbon dioxide was driven partly by the “Act on Rational Use and Proper Management of Fluorocarbons,” of Japan that came into effect that year.
The company has also noticed that this regulation of Japan on the management of f-gas was part of a larger policy trend of environment that was accelerating globally and particularly in Europe which is one of the main export markets of the company.
The Manager of Sales and Marketing, Toshihide Haruki, for ATS Japan said that when he was visiting various semiconductor factories in different locations throughout Europe, he would often meet the local business people who were aware of the Kyoto Protocol than the people in Japan.